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Nitrogen Trifluoride

Uses & Applications for Nitrogen Trifluoride Gas by Industry

– Electronics

Nitrogen Trifluoride is used in semiconductor fabrication for plasma or thermal cleaning of CVD reactors.

Sizes Available – Contents in cubic feet (cf)

Nominal Contents Part Number
Physical Size
CGA Valve Overall Purity Recommended
O.D. Height

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44# RS03101200 9.00 51.00 330 99.7%
44# RS03103200 9.00 51.00 330 99.999%

Other sizes are available upon request

Cylinder Brackets/Accessories Contact us for additional information.

Shipping Information

CAS Registry Number: 7783-54-2
UN number UN 2451
DOT Proper Shipping Name: Nitrogen Trifluoride
DOT Classification 2.2 (Nonflammable Gas and Oxidizer)
DOT Label Nonflammable Gas and Oxidizer

Description of Nitrogen Trifluoride

Nitrogen Trifluoride (NF3) is a colorless, stable, and toxic gas with a characteristic moldy odor under ambient conditions. NF3 is used in many critical semiconductor applications.

Nitrogen Trifluoride has a commercial grade purity of 99.7%; AGP can provide higher purity NF3 for your more strict requirements;. A number of options are available, please contact us for additional information.

Gas Data:
Formula: NF3
Molecular Weight: 71.002
Density: 2.96kg/m3@20C
Specific Volume: 5.4 ft3/lb @ 70F, 14.696 psia

Our Company is comprised of the following principle business lines:

  • Full-service industrial & specialty gas supplier.
  • National Helium Supply: AGP serves retail and wholesale Helium customers throughout the continental US.
  • National Beverage Carbon Dioxide Supply: AGP utilizes direct and partner coverage to supply throughout the continental US
  • Regional Welding Supply Retailer and full-service Welding Equipment and Consumable Sales
  • Cryogenic Gases in Liquid Container, MicroBulk and Bulk form.
  • Bulk and cylinder propane sales.

Directions to American Gas Products

American Gas Products
24 Vine Street
Everett MA 02149
+1 (800) 439 - 0100
United States of America

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About our Operations:

  • AGP's business hours are 7am to 5pm Monday through Friday. Earlier service is often available.
  • Emergency service contact available 24/7.
  • Saturday retail hours – 8-12 –excluding summer months
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  • Flexible, reactive, rapid response to customer requests.
  • Can do attitude.
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