Uses & Applications for Nitrogen Trifluoride Gas by Industry
– Electronics
Nitrogen Trifluoride is used in semiconductor fabrication for plasma or thermal cleaning of CVD reactors.
Sizes Available – Contents in cubic feet (cf)
Nominal Contents | Part Number |
Physical Size
Inch |
CGA Valve | Overall Purity | Recommended Regulator(s) |
|
O.D. | Height |
click below for link to regulator details |
||||
44# | RS03101200 | 9.00 | 51.00 | 330 | 99.7% | |
44# | RS03103200 | 9.00 | 51.00 | 330 | 99.999% |
Other sizes are available upon request
Cylinder Brackets/Accessories Contact us for additional information.
Shipping Information
CAS Registry Number: | 7783-54-2 | |
UN number | UN 2451 | |
DOT Proper Shipping Name: | Nitrogen Trifluoride | |
DOT Classification | 2.2 (Nonflammable Gas and Oxidizer) | |
DOT Label | Nonflammable Gas and Oxidizer |
Description of Nitrogen Trifluoride
Nitrogen Trifluoride (NF3) is a colorless, stable, and toxic gas with a characteristic moldy odor under ambient conditions. NF3 is used in many critical semiconductor applications.
Nitrogen Trifluoride has a commercial grade purity of 99.7%; AGP can provide higher purity NF3 for your more strict requirements;. A number of options are available, please contact us for additional information.
Gas Data: | ||
Formula: | NF3 | |
Molecular Weight: | 71.002 | |
Density: | 2.96kg/m3@20C | |
Specific Volume: | 5.4 ft3/lb @ 70F, 14.696 psia |